Used SEMITOOL 470F #151769 for sale
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SEMITOOL 470F photoresist equipment is an automated solution for coating, developing and cleaning wafers used in the semiconductor industry. Its advanced design facilitates greater precision and repeatability in wafer processing operations, including dry film and wet film operations. The system is designed to apply photoresists to both single and dual-sided wafers. Photoresists are an organic polymer material that is uniform and light-sensitive, and is used in semiconductor manufacture. The application of a photoresist to a wafer helps create features for each device, enabling the manufacturing of fine-pitch semiconductor devices. 470F is composed of multiple modules which are integrated across the wafer process line. This includes the Automatic Wafer Loader (AWL), wafer transport, and various process modules such as the Spin Coater, Spinner, Developer, Cassette Cleaner, and Hot Slot. The Automatic Wafer Loader (AWL) provides a reliable and accurate positioning and transfer of wafers to and from the unit. In addition, the AWL allows for cassette mounting on a compatible interface, allowing for efficient and reliable cassette-to-cassette transfer. The wafer transport module provides a complete transport and motion control while reconfigurable transport path is achieved by a complete closed-loop motion control and data logging machine. The process modules enable the photoresist to be applied to the wafer. The Spin Coater is used to create uniform coatings on the wafer at high speeds. The Spinner is used for developing the photoresist on the wafer, for removing excess photoresist and for removing residue. The Developer module is used for removing the unwanted photoresist prior to etching or creating the circuit patterns. The Cassette Cleaner is used to clean the wafer during the operation by spraying cleaning solutions. The Hot Slot is used for drying the photoresist. In conclusion, SEMITOOL 470F Photoresist Tool is a comprehensive automated solution for coating, developing, and cleaning wafers used in the semiconductor industry. The integrated modules and advanced design enables greater accuracy and repeatability in wafer processing operations.
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