Used SEMITOOL 470S #9105722 for sale

SEMITOOL 470S is a photoresist unit that is used for processing semiconductor wafers during photolithography processes. The equipment is a full-featured tool, designed to process both front- and back-end applications with minimal operator intervention. The system is built on a wafer-handling unit supported via a high-resolution X-Y actuator that can handle a variety of wafer sizes and thicknesses. It can also interchange wafers sizes with minimal setup time, using the Auto Alignment Machine (AAS) which compensates for positional discrepancies between substrates. SEMITOOL 470 S is equipped with an automated chemical delivery tool which ensures accurate chemical delivery to the wafer surface and limits exposure to hazardous materials. The asset features a hot.cold capacity, allowing both warm and cool processing. It also comes with a wide range of thermal resist processing capabilities, including pre-bake, thermal oxide, oxide etch, and DRIE. 470S has a PLC model that monitors all unit settings and based on the program, creates a graphic interface on the systems controller. This ensures all process steps are executed in an optimized and repeatable manner. The equipment has a Multi-Purpose Process Station (MPPS) for processing options for substrate cleaning, etching, resist Apply, post exposure bake, curing, etching, spin scrub, ashing, etc. 470 S is designed with a tightly sealed process chamber and an on-board dopant delivery system. This allows the wafers to be processed in an oxygen- and water-free atmosphere, ensuring optimal etch rate. The unit is also equipped with an optical monitoring machine with a CCD camera, allowing the operator to observe the process in real time. Finally, SEMITOOL 470S includes a UV source for high-quality photolithographic processes. The unit is equipped with a 13.5sq.cm standard exposure mask, and can also be used with a 375nm, UV laser for more precise processes. In conclusion, SEMITOOL 470 S is a versatile and reliable photoresist tool that provides the operator with an array of process options. The unit is designed with easy control and monitoring, ensuring consistent, repeatable results.