Used SEMITOOL 470S #9209035 for sale

Manufacturer
SEMITOOL
Model
470S
ID: 9209035
Spin rinse dryer Includes: Rotor, 4"/6" Digital controller: PSC-101.
SEMITOOL 470S is a photoresist equipment designed for semiconductor fabrication processes. It is capable of achieving high performance during wet cleaning, developing, etching, and photoresist stripping processes. With this system, users can achieve consistent results in their nanofabrication workflows as it provides repeatable processes and superior processing control. SEMITOOL 470 S is a single-chamber vertical unit with a short open process chamber that can support various small-scale etch, deposition, resist spin, and metrology processes. It can utilize wet cleaning, developing, etching, and photoresist stripping to achieve the desired result. The internal process chamber allows for quick process changes, allowing users to switch between processes quickly and easily. The machine also features a proprietary EasyClear digital vision sensor package that can be used for controlled loading and unloading of the substrate during operation. The Load/Unload Station also has embedded semiconductor technology that allows users to load and unload substrates without any manual contact, thereby eliminating the risk of contamination. The tool is equipped with an automated monitor asset which is capable of scanning to detect critical parameters such as substrate temperature, pressure, humidity, and process trends. This ensures that the Photoresist model is under constant control and enables proactive readjustment of the process parameters to ensure best working conditions for a particular application. 470S Photoresist equipment is also equipped with intelligent energy conservation and environmental protection measures, such as the energy-efficient heating system and inert gas purge treatment. These measures allow users to use the unit with minimal impact to the environment. In addition, all of the components of the machine are built with high quality standards in order to provide highest purity process conditions and strong long-term reliability. 470 S Photoresist tool can be configured with a wide range of accessories to obtain the best possible processing results.
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