Used SEMITOOL 480 #78272 for sale
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ID: 78272
F-Style Spin rinser dryer, bench top with rotor
Accommodates up to 8” low profile
101 Controllers, Digital
Ferrofluidic Rear Bowl Shaft Seal
Electropolished bowl
Polypropylene Cabinet Aero Style
Electropolished Bowl
1/2 HP Direct Drive Motor
Rotor to accommodate low profile 8” A192-81M
Static Eliminator
Resistivity
Complete Documentation Package
Guaranteed Particle counts < 25 at .5 micron
17 meg Ohm DI water and class 1 N2.
SEMITOOL 480 Photoresist Equipment is a quality solution for high throughput photolithography processing. This system is designed to provide a reliable and repeatable process for the manufacture of printed circuit boards, flat panel displays and similar precision electronic devices. The unit is composed of three major components: the photoresist track and spinner machine, the cartridge-based chemical delivery and 480 Controller. The photoresist track and spinner tool are the fundamental components of this asset and consist of a track with a series of spinner modules and a spinning motor. This model is designed according to the cut-loading process, enabling high throughput production and short processing times. The spinner modules are driven by the spinning motor, which is calibrated and adjusted to ensure an exact repeatable movement of the photoresist track. The track is equipped with sensors to detect the timing and the position of both the photoresist and the substrate, ensuring a repeatable process. A vertical caster mechanism is placed at the end of the track, allowing substrates to be easily loaded and unloaded from the equipment. The chemical delivery system is composed of cartridge-based chemistry modules with a metering device and is designed to provide limited contact between the chemistries and the process environment. This ensures that any residual chemistry remaining the module does not cross contaminate the substrate or the track unit. The cartridges are interchangeable to reduce solvent waste, ensure fast chemistry change and minimize maintenance costs. The modules also incorporate safety features, such as overfill detection, flow control and sensor monitoring. SEMITOOL 480 Controller is designed to allow the user to remotely control and monitor the entire process. This controller is equipped with advanced features, such as recipe synchronization and multi-machine operation, providing the user with total process control. The controller also allows for remote diagnostics and provides error messages to the operator. 480 Photoresist Tool is designed to provide an optimal blend of repeatability and flexibility, making it a valuable solution for manufacturers looking to increase production quality and yields.
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