Used SEMITOOL 480S #135528 for sale

SEMITOOL 480 S is a photoresist equipment that is used to perform single-wafer wet-processing system operations within the semiconductor manufacturing process. It features a proprietary, end-to-end automation solution for cleaning, etching, stripping and drying photoresist layers onto semiconductor wafers. 480 S is designed to accurately and precisely process up to 16 wafers in each batch. It employs a top-down mechanical robot syringe to dispense small amounts of photoresist fluid onto the wafer surface. This is an environmentally-friendly unit that minimizes liquid waste and maximizes process uniformity. The machine also features an adjustable dispense valve which ensures optimal and consistent dispense dosage of photoresist across the wafer surface. The photoresist tool also provides an efficient and uniform distribution of the liquid by using a special spray manifold and nozzle combination. This results in superior uniformity of the photoresist across the wafer and avoids wasting of photoresist when depositing onto larger die areas. SEMITOOL 480 S also employs a specialized scrubbing motion applied to the wafer surface to reduce the number of defects per wafer. Additionally, a circular platform allows the wafer to rotate continuously while photoresist is being applied, resulting in an even coating across the wafer. This asset also has a series of dedicated heaters and thermocouples that measure the wafer temperature during the entire photoresist application process. This monitoring guarantees that the wafer is kept at a consistent temperature, resulting in a higher yield and better quality of the photoresist layer. Finally, 480 S features an automated drying algorithm that ensures all of the photoresist is removed from the wafer, leaving a clean, high-resolution surface finish. The drying process eliminates any surface residue or particulates and avoids damages to the underlying photoresist layer.