Used SEMITOOL 480S #9105286 for sale

SEMITOOL 480S is a photoresist equipment used for coat and develop processes in semiconductor device fabrication. It is designed for use in production environments, with a high tolerance for environmental contaminants, including those produced by other processes such as plasma etching and chemical-mechanical polishing. It is a fully automated system that provides precise, uniform resist coating and development on wafers. It features a shallow tank bath with an adjustable wafer float height for superior coverage across the wafer surface. An in-situ monitor ensures uniform resist distribution and thickness. The automatic leveling unit ensures edge bead coverage and prevents edge build-up. The machine also features smart chemical delivery for reduced chemical overrides and spray delivery enhances uniformity. With an advanced on-board PLC for fully automatic, unattended operation, operation is easy and reliable. 480S utilizes state-of-the-art dry-in-place process tools for rapid cycle time. It includes an optimized resist pre-drying tool utilizing temperature controlled air to accelerate pre-drying, an ultraviolet energy curtain for maximum uniformity and improved resist adhesion, and a quick-pulse resist exposure asset. SEMITOOL 480S also includes an automated cleanout routine that clears the chamber of any chemical deposits, saving both cost and time. It also includes an easy to navigate HMI menu for efficient scheduling and monitoring of processes. Finally, the model is supported by a comprehensive service package, including diagnostics, repairs, and support, and comprehensive training in installation and operation. In summary, 480S provides semiconductor device manufacturers with a versatile and reliable photoresist equipment. Its combination of automated features, efficient process tools, and robust support make it an ideal choice for production environments.