Used SEMITOOL 8300 #9155186 for sale

Manufacturer
SEMITOOL
Model
8300
ID: 9155186
Dual stack spin rinse dryer (102) Controller.
SEMITOOL 8300 is a photoresist equipment designed for use in chemical-mechanical planarization (CMP) and thermal chemical vapor deposition (TCD) production processes. It is the latest development in SEMITOOL-developed systems for achieving finisher results for wafer surfaces. The system features a touch screen, easy operation, and a low-profile design allowing the operator to change recipes and programs without needing to create multiple manual entries. 8300 unit is a three-axis platform, providing improved repeatability and accuracy for critical processes. It features a long-life non-contact measuring head for accurate and repeatable measurements on the wafer surface. The measuring head is located just above the substrate, allowing for minimal contact, further minimizing chamber contamination. The machine can be configured with either a heated chemical delivery tool or a chamber-integrated manipulation asset. The heated delivery model provides precise delivery of chemicals for optimized cleaning processes and controllable etch processes. The chamber-integrated manipulation equipment ensures accurate material transfer, providing consistent results and minimized contamination. SEMITOOL 8300 also features advanced process control (APC) in order to provide users with an automated, intuitive and simplified approach for achieving optimal process results. APC utilizes advanced algorithms to enable precise control of the CMP and TCD processes. Additionally, the system includes a set of configurable sensors, allowing users to control the wafer cleanliness and adhesion levels. These capabilities enable users to optimize material removal, cleaning, and deposition, achieving reproducible and repeatable process results. 8300 is also incredibly easy to maintain. The unit includes a cleaning machine, multiple process tanks, and a backside Z-height monitor, which allow the user to monitor and maintain cleanliness of the chamber environment. In addition, a suite of MTBF (mean time before failure) processes are available, aiding in the optimized control of the tool. In summary, SEMITOOL 8300 is a next-generation photoresist asset ideal for use in a variety of production processes. It features advanced process control, long-life non-contact measurement head, automated material transfer, and ease of maintenance and reliability. The model guarantees precise and repeatable process results, ensuring customer satisfaction.
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