Used SEMITOOL 8300S #9160072 for sale
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ID: 9160072
Spin rinse dryer (SRD)
Capable of process up to 8"
High profile cassettes
Dual stack
Included:
Class 10 poly
Quick disconnect rotor
N2 rear seal.
SEMITOOL 8300S is a photoresist equipment designed for wafer processing applications in the semiconductor industry. The system provides precise photoresist spin coating and subsequent drying,while also providing accurate metrology measurements of thinner films. This enables production of sophisticated optoelectronic devices such as photodetectors and other components. The overall unit consists of several components: a temperature-controlled spin station, a vacuum-controlled oven, a superior vision-based imaging subsystem and sophisticated software. SEMITOOL 8300 S utilizes a centrifugal motion drive and a low drag air bearing/turntable for high resolution spinning and precise speed control. The high performance vacuum oven ensures uniform drying and crystal growth providing excellent uniformity in spin patterns and improved coating thickness. The imaging machine provides precise detection of etched features and allows for identification of non-uniformity or contamination. In addition, 8300-S incorporates integrated software with automatic control and optimization algorithms. 8300 S offers a high level of precision, accuracy, and flexibility in its processes. Precision spin coating is achieved with a wide range of coating speeds, ranging from 20-1800 rpm, significant leveling enhancement, and improved vibration control due to its high speed compressor. Additionally, the tool provides precise metrology measurements which ensure compliance with product specifications and ensure high yield. Flexibility is also a key feature of SEMITOOL 8300-S, and this is enabled by its highly-customizable software. Its intuitive user interface simplifies operation and allows easy modification of processes and recipe setup. Fault detection and recovery functions ensure that any unexpected events are handled quickly and precisely. In summary, 8300S provides excellent performance and reliability for semiconductor industry applications. Its low drag air bearing/turntable, precise speed control, superior vision-based imaging, integrated software, and high precision metrology measurements make it an ideal choice for the production of high volume, high quality optoelectronic components.
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