Used SEMITOOL 840F #151787 for sale
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ID: 151787
Wafer Size: 4"
Spin rinse dryer, 4"
101 Controllers Digital
Ferro Fluidic Seal
Brushed Motor
Electro polished Bowl Finish
Polypropylene Cabinet “Aero Style” : New
Color coded pneumatic lines
Resistivity Option
CE door lock requirement
Rotors (1-2”, 1-4”) 4 bolt
Complete Documentation Package
Guaranteed Particle counts < 25 at 0.3 micron
Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2
Shipping Crate.
SEMITOOL 840F is an advanced Slurry Processing Equipment for photoresists. This system is designed for photoresist development, photolithography, etching, and cleaning processes, and is suitable for a variety of semiconductor applications. The unit features a precision metering machine and advanced volume control capabilities, allowing precise, repeatable slurry applications. This results in higher productivity and more reliable results with reduced cycle times. A robust control platform ensures precise, repeatable photoresist coatings and rinse functions, resulting in reliable and consistent outcomes. 840F is equipped with four high-performance resist dispersion pumps, which enable an even distribution of resist for consistent thin films. This tool also has a temperature-controlled delivery asset, which ensures that resist remains in precise temperatures and viscosities for accurate thin-film coating. The model is featured with dual-action barrel agitation, which allows for precise mixing of photoresist slurry, enabling improved uniformity and repeatability. Additionally, dual pass-through wash capability improves resist coating uniformity and eliminates the need for a manual flush step. SEMITOOL 840F is designed with a robust alarm equipment which alerts the operator if any components are out of tolerance or if a system fault has occurred. It also features automatic self-calibration and fluid level sensors, allowing the unit to remain accurate without manual calibration. The machine's design ensures minimal particles contamination and reduced maintenance and downtime, allowing for extended tool uptime and product availability. The platform is also compatible with a wide variety of chemicals and slurry formulations, allowing for customizable operation. 840F is an advanced Slurry Processing Asset for photoresists that is suitable for many semiconductor applications. Its industry-leading design provides high-precision metering, dual-action barrel agitation, dual pass-through wash capability, and a temperature-controlled delivery model, ensuring maximum efficiency, repeatability, and reliability.
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