Used SEMITOOL 840S #84177 for sale

SEMITOOL 840S
Manufacturer
SEMITOOL
Model
840S
ID: 84177
Wafer Size: 4"
Spin rinse dryer, 4".
SEMITOOL 840S is a photoresist equipment designed to meet the demands of today's semiconductor industry. This system is designed to provide the highest accuracy and precision in photoresist processing and deliver high-performance results with minimal downtime. 840S features an intuitive, user-friendly interface for easy control of the unit and improved recipe management. The machine includes a polishing platform with an integrated micro-scrubber and a multiple-axis wafer transfer arm for repeatable accuracy and wafer positioning. The tool is equipped with a Peltier cooling asset to reduce thermal drift and maintain model performance when processing at elevated temperatures. SEMITOOL 840S photoresist equipment uses a multi-wavelength laser system to provide precise control over the photoresist process. This unit includes both a long-wave and short-wave laser with independent controls for patterning the photoresist at different wavelengths. The machine also features a Bosch process module, which provides exacting positional accuracy and process variables in order to achieve the best photoresist patterning results. 840S is designed with built-in safety features to ensure consistent results. This tool is equipped with an Atmosphere Control Asset (ACS) which maintains a clean air environment inside of the model to prevent dust and debris from collecting on the wafers. Additionally, the photoresist equipment has a Radiation Containment System (RCS) which monitors the laser irradiance and restricts the spread of radiation. SEMITOOL 840S features an advanced Software Command Language (SCI) which facilitates remote monitoring and control of the photoresist unit. The SCI allows for easy access to data collection and analysis, improved recipe management, and alarm notification functions. Additionally, this machine is capable of executing over 100 pre-programmed recipes. 840S is an excellent photoresist tool for any semiconductor fabrication facility. With its high accuracy, precision, and repeatability, users can rest assured that their wafers will meet the most stringent industry specifications. The user-friendly interface and wide range of safety features make SEMITOOL 840S a safe, reliable option for any photoresist processing job.
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