Used SEMITOOL 840S #9088736 for sale
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ID: 9088736
Wafer Size: 4"
Vintage: 2002
Dual stack spin rinser dryer, 4"
(2) PSC 101 Controllers
Dual resistivity monitors
Rotors not included
120 VAC / 50-60 Hz / 1 Ph 3-Wire / 15 A
2002 vintage.
SEMITOOL 840S Photoresist Equipment is an advanced equipment engineered for the provision of ultra-precise lithography processing of semiconductor wafers and other substrates. It provides an extensive set of features that allows for high-performance, consistent fabrication technology. 840S is a direct-drive, overhead automated coating and developing solution that is capable of supporting a wide range of photoresist applications. Its superior engineering reduces local variability and enables the processing of semiconductor wafers from 3 to 12 inches in diameter. Its intuitive and user-friendly design simplifies installation, operation, use, and maintenance, while its robust materials and construction ensure durability and reliability for years to come. SEMITOOL 840S Photoresist System includes a masking device, a built-in electrical generator, vacuum controllers, wet benches, and a powerful software suite to operate the entire assembly. This user-friendly unit allows technicians to program or adjust the photoresist processing steps in a fraction of the time required for manual processes. The processing steps include automatic pattern recognition, dry and wet spin coating, prebaking, exposing, postbaking, developing, resist stripping, and residue removal. 840S also includes a full set of diagnostics to ensure the highest process performance across most resist materials, including the ability to process negative and positive resists, and the option of choosing betweenspin or evaporation spin coating. To ensure maximum wafer yield, visible, ultraviolet, and infrared imaging is used to detect defects or contamination. This feature also helps to identify and correct problems on the fly. In addition, SEMITOOL 840S is designed with safety in mind, offering up to four integrated safety sensors that can detect the presence of a wafer, as well as preventing a wafer from being dropped or overspin. Finally, the machine is backed by a multi-level service plan that provides technical assistance as needed. 840S Photoresist Tool is a dependable and efficient solution for professional semiconductor fabrication.
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