Used SEMITOOL 860S #133030 for sale
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ID: 133030
Spin Rinse Dryer (SRD)
PSC 101 controller
Servo motor, brushless
Can configure tool with anti-static
DI water resistivity option included
Water recirculation option included
New rotors are available (2 are needed).
SEMITOOL 860S is a photoresist equipment solution designed for photolithography processes. This product is used in the semiconductor industry for making circuit boards, LED chips, and other integrated circuits components. The system is capable of processing large volumes of photoresist quickly and efficiently. 860S unit consists of two key components, a rotating process tank and an overhead deposition machine. The process tank is equipped with spray guns, scrubbing wands, and vacuum jets to help maneuver the photoresist in the tank. It also has an automated cleaning cycle to prevent contamination of the photoresist. The overhead tool deposits photoresist onto a substrate using a generative jet deposition process. The jet allows the uniform positioning of photoresist along the substrate. The asset also includes a control interface with a touch screen display and integrated software model. This allows users to precisely monitor the photoresist process in order to get the desired results. The interface also collects feedback from the equipment to update the process parameters and track results. SEMITOOL 860S system provides a high yield manufacturing rate and excellent uniformity. It also requires minimal tooling, since the components of the process tank are assembled in-situ. The unit is also programmed to follow pre-defined recipes for specific product requirements. In addition, 860S is easy to maintain, as all components can be independently monitored and kept in top working order. It is also constructed from corrosion resistant materials and has a fully enclosed cover for dust prevention. The machine can be interfaced with other SEMITOOL systems to increase complexity and capabilities. Overall, SEMITOOL 860S is a powerful and efficient photolithography tool that is widely used within the semiconductor industry. This asset provides a consistent and optimized photoresist solution that is capable of producing high yields and uniform deposits. With its intuitive user interface and automated processes, 860S is a reliable tool for photolithography.
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