Used SEMITOOL 860S #151778 for sale

SEMITOOL 860S is a photoresist processing equipment that provides quick, accurate, and reliable lithography for a wide range of semiconductor fabrication applications. This system includes a precision motorized wafer stage, closed loop temperature control, and Photoresist optimization features. 860S features a large 600 X 800mm precision panel base with large format aluminum heat sink, a vacuum chuck unit, and a precision motorized wafer stage. A Cambridge ESI 4560 advanced controller handles the control, monitoring and display of process parameters and data. The dynamic servo control of the UMPC ensures stable processes and high throughput. SEMITOOL 860S was designed with closed loop temperature control providing accurate and repeatable process temperatures. An array of pyrometers and thermocouples enable real-time monitoring of the wafer temperature to ensure process repeatability. An IRBAPF10 provides optical feedback to the motorized wafer stage for accurate wafer leveling and alignment. The advanced automation of the machine provides further process optimization including automated pre-coating, coating profiles, and resist strip profiles. An advanced substrate handler is also utilized for wafer handling and sorting. The tool is also capable of automating care and maintenance to ensure reliable performance for long periods of time. 860S is a great choice for lithography applications in the semiconductor fabrication process due to its precision, speed, and accuracy. With its array of process control features and automated tools, SEMITOOL 860S proves to be a reliable, accurate and economical choice for semiconductor resist processing.