Used SEMITOOL 860S #16794 for sale
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SEMITOOL 860S Photoresist Equipment is a fully automated reel-to-reel wet processing system. It is designed for high-volume production of semiconductor devices with finer geometries, requiring precise and repeatable processes. 860S unit is based on a modular platform that enables a wide range of processing to be integrated into one machine, including 'strip, clean, spin/removal and dry' processes, providing an efficient and cost-effective solution for applications requiring high volumes of throughput. The tool includes a stainless steel belt conveyor, manual or optical alignment, 'mesh or apron' partitions, and a main module consisting of a process control unit, software, pump, tanks and filter. An additional 'dryer' module is available with the asset. The unit allows for full process automation with the use of onboard sensors and automated controls. The model also features isolated processing, batch mode setup, and programmable settings for a variety of substrate and process combinations. SEMITOOL 860S equipment is designed to optimize and control processes during etching and/or deposition of remaining photoresist layers. The system can be configured to accurately transport and precisely align substrates and accurately dispense the required chemistries over required area of the substrates. The unit utilizes low chemical volumes, reducing cost and waste. The onboard sensors provide real-time control and monitoring to adjust the chemical concentrations and parameters, enabling optimal process results. 860S machine provides repeatability and reliability in photoresist processing for production of semiconductor devices. It enables cost savings through high-rate processing of substrate materials, along with easy maintenance and support.
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