Used SEMITOOL 870 #9139664 for sale

SEMITOOL 870 photoresist equipment is an efficient and reliable tool for etching and patterning processes on a range of substrate materials, including metals, ceramics, and silicon. The system is equipped with a reliable, maintenance-free 10-inch Temperature Controlled Platter with Reactive Ion Etch (RIE) capability. 870 utilizes a combination of reactive gases to etch photoresist patterns in the materials with electric and magnetic fields, allowing for remarkable precision and speed in the etching process. The contactless, physical vapor deposition (PVD) unit enables heightened control over the timing and density of the resist mask deposition. A variety of substrates can be processed with SEMITOOL 870, including NiFe, SiC, Nb, and Ti, making it suitable for a wide range of applications. 870 also comes with a built-in programmable controller with 6 programmable zones and up to 6 user-defined recipes. It has the ability to reheat some parts of the platter to the desired temperature for rapid process repeatability. The precision of SEMITOOL 870 is further improved with thermo-mechanically-enhanced mechanical dispense valves which provide reliable dispense performance with a minimal number of shot-to-shot variations. The machine also boasts options such as automated mask transfer and loading, highly configurable Etch and Photoresist Plating recipes, continuous gas flow-monitoring, laser metrology, and drain tanks, as well as a robust resist stage with up to 10 containers. Various resist materials including metal and silicate-based resists can be used, eliminating the need to change resists for multi-application processes. Furthermore, 870's quick alignment feature ensures that substrate-to-substrate alignment times remain minimal. SEMITOOL 870 is a cost-effective, reliable, and advanced photoresist tool that can support a wide range of fabrication processes, making it a great solution for those searching for a high-quality etching asset.