Used SEMITOOL 870 #9265753 for sale

SEMITOOL 870 photoresist equipment is an automated platform for processing of wafers with photoresist materials. Photoresist is a chemical coating applied to the surface of wafers that is sensitive to light and can be used to transfer lithographic patterns onto the surface of a wafer. 870 photoresist system offers high accuracy and productivity with a precise lithography process. It features a helium spin-coater that coats the wafer with a uniform layer of photoresist material. The spin-coater is designed with software-configurable spin speeds and temperature-controlled recipes for uniform process results. The unit's precise coating and uniform thickness eliminates the need of a standardization process and increases throughput. SEMITOOL 870 features a motorized XY spider process platen which precisely aligns and controls the wafer during the spin-coating process. The machine also includes a low-stress photomask aligner, with a resolution of up to 50nm, for accurate and repeatable alignment of photomasks and hard masks over the wafer surface. The tool offers programmable temperature control and process monitoring with a single view process recipe, which simplifies operator interaction. A built-in dry-pumping asset eliminates the need of a separate vacuum-generator, eliminating the need of manual exchanges of exposure cassettes and masks. A spatial filter is also included which simplifies access to light source trends and ensures a consistently homogeneous exposure of light on the wafer while minimizing shadow-stepping across the surface. 870 is designed for reliable process control and flexibility in production. The model accommodates a wide variety of wafer sizes and thicknesses for any resist type and can adapt to new process recipe changes quickly without recalibration. The equipment is designed to be easy to maintain, and parts replacements are simple and neat. And with multiple process monitoring tools configured, operators can quickly check and verify process conditions. SEMITOOL 870 is ideal for any photoresist production process in need of accurate and repeatable production. With a uniform process and high accuracy, 870 strives to improve productivity and manufacturing yield. Thus, it is a valuable tool for photoresist production.