Used SEMITOOL 870D #84759 for sale

SEMITOOL 870D
Manufacturer
SEMITOOL
Model
870D
ID: 84759
Double stack unit. 328 3-cycle control. Refurbished unit.
SEMITOOL 870D is a photoresist system specifically designed to process semiconductor wafers. It is well-suited to dielectric etching, photoresist stripping, and wafer cleaning processes, and is used in the semiconductor industry for those applications. 870D offers high-performance solutions for a broad range of applications and processes, from aggressive etching to precision etching. SEMITOOL 870D is equipped with several key features, including two independent process modules, heated PC-controlled wafer chuck, heated PC-controlled sample tray, UV flood and lamp input, inert gas input, and closed-loop process control. 870D uses a heated PC-controlled wafer chuck to ensure uniform heating and etchant distribution, and to minimize particle contamination. The heated sample tray ensures that the photoresist is evenly applied to the wafer. This ensures high latch-up and aspect ratios, and reduces the formation of defects. The UV flood and lamp are used to activate the photoresist prior to etching. In addition, SEMITOOL 870D has an inert gas input to improve collection and reduce contamination. 870D is able to provide selectable etching speeds and uniform etching to increase manufacturing yields. Additionally, SEMITOOL 870D has closed-loop process control with tools such as on-board energy monitoring, real-time process monitoring, post-etch analysis, and on-the-fly corrections to ensure accurate, repeatable, and reliable processing. This data can be used to ensure that processes are within all of the necessary parameters. 870D offers the latest in semiconductor technology, and is a highly capable photoresist system. SEMITOOL 870D's advanced features and capabilities ensure a reliable and efficient workflow, and can improve process throughput and yield. The closed-loop process control also provides a powerful, accurate solution for ensuring the integrity of processes, making 870D an ideal solution for semiconductor manufacturing.
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