Used SEMITOOL 870F #151768 for sale

SEMITOOL 870F
Manufacturer
SEMITOOL
Model
870F
ID: 151768
Wafer Size: Up to 6"
Dual stack spin rinse dryer, up to 6".
SEMITOOL 870F is a Photoresist Equipment designed to provide high throughput and time-efficiency for high-precision photolithography processes. It is capable of handling large scale substrates and offers professional-quality results for the most demanding photolithography applications. The system features a modular design to allow for more versatile usage of the tool. One of the main advantages of this unit is its minimal maintenance requirements. The machine is designed to operate in a fully automated mode with minimal setup times and no manual intervention, allowing for increased throughput and cost savings. 870F tool is equipped with a large-diameter track featuring a meandering track path with multiple stops. The track is designed to minimize substrate transport time while providing powerful acceleration and deceleration. A performance-optimized motor ensures accurate and repeatable motions during loading and unloading. The stage is designed to enable precise positioning of alignment and exposure sites with a travel distance of up to 600 mm. The asset features an intuitive user interface for easy customization of recipes. The model offers an array of advanced features such as substrate recognition, exposure control, plate loading, and more. The integrated pattern recognition software allows for rapid setup and control of very complex 'grid' exposures. SEMITOOL 870F equipment also offers an integrated photoresist processor. With this feature, users can automatically clean and dry the resist-coated substrates before loading into the system. This helps reduce wasted photoresist materials, increase throughput and accuracy, and maximize cost savings. The unit has also been designed to enable quick loading and unloading of substrates, with a maximum loading time of 0.3 sec per substrate. It features an ergonomic human-machine interface for improved user comfort. Additionally, the integrated process monitoring software ensures consistent and reliable performance across all runs. Overall, 870F is a powerful and highly advanced Photoresist Machine perfect for high-precision photolithography processes. It offers time-efficiency and increased throughput, advanced features, and minimal maintenance requirements for maximum cost savings.
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