Used SEMITOOL 870F #178373 for sale
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ID: 178373
Spin Rinse Dryer (SRD), up to 6"
Double stack on a roll around cart
Possible options include: rotors, static eliminator, resistivity monitor and water recirculator
"F" model has the class 10 poly, brush motors and the P-328 controllers.
SEMITOOL 870F is a fully automated high-performance photoresist develop and strip equipment designed to increase the accuracy and efficiency of semiconductor wafer processing. This system offers an expansive and reliable platform for advanced photoresist development and cleanroom integration. 870F was designed with a high throughput capacity, achieving up to 800 runs per hour. Offering a ripple conveyor unit that can handle substrates up to 200mm in size, this photoresist machine allows for efficient, simultaneous processing on multiple modules. Completed with a flexible chamber configuration, it provides the ability to apply a variety of process chemistries and contains a maintenance-free static neutralizing filter that helps reduce contamination within the chamber. This tool also features a highly ergonomic design. It performs a variety of delicate operations and is equipped with a light curtain to protect people from hazardous optical radiation. Due to its versatile design, SEMITOOL 870F can be easily integrated with other SEMITOOL process modules for a comprehensive engineering solution. In addition, 870F offers multiple safety features, reducing downtime and interruptions during production. It is capable of storing up to 4,000 recipes, providing optimum process parameters that ensure the highest quality yields. Improved with a powerful and intuitive software, recipes can be researched, modified and stored with ease. Overall, SEMITOOL 870F photoresist asset facilitates advanced development and strip of substrates in a wide range of applications. Its multiple integrated technologies simplify integration and operation while delivering excellent performance and reliability.
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