Used SEMITOOL 870F #293725516 for sale

SEMITOOL 870F is a photoresist equipment for thin-film deposition processing in semiconductor fabrication. It provides exceptional process controls with unique automation capabilities. The system is versatile, featuring various programmable modules to allow a wide range of customizable processes. 870F is ideal for a variety of photoresist needs, including SiON etch, PR removal, coplanarization, and protective overcoat deposition. SEMITOOL 870F offers robust process control capabilities, with a wide range of tool-to-tool, film-to-film, and batch-to-batch variation elimination. It is also highly programmable, allowing for precise deposit patterns and customizable assemblies for various amounts of exposure time and concentrations. 870F is built on the Modular Platform Interface (MPI) architecture and predictive modeling techniques, providing improved monitoring and diagnostics, tighter predictions, and faster process optimization. The unit features an advanced multi-chamber design, with its most versatile processing chamber equipped with an overhead showerhead-style deposition head, mechanical arm-based application machine, and two independent radio-frequency (RF) substrate heating sources. It is both gas and liquid compatible, allowing for deposition of a variety of materials such as oxide, nitride, and metals onto a variety of sample size and shapes. SEMITOOL 870F also features an integrated wafer fingerprint reader, enabling it to recognize the wafer geometry, substrate type, and material composition for specific wafers. This allows for a more reliable, efficient, and accurate process. Its high-resolution vision tool enables fast, precise positioning of the substrate, to ensure accurate and repeatable processing. It also offers quick setup time, efficient substrate handling and matching, and easy maintenance. The asset can be integrated into any existing process chamber with minimal transfer time, and the entire chamber can be moved without the need for re-qualification. 870F is compatible with both SMIF and FOUP (Front Opening Unified Pods) pods, so it can easily be integrated into a variety of cleanroom environments. With its highly precise process control, integrated vision model, and rapid setup time, SEMITOOL 870F photoresist equipment is an ideal solution for a variety of photoresist needs in a semiconductor fabrication environment.