Used SEMITOOL 880S #293683353 for sale
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SEMITOOL 880S is a programmable photoresist equipment designed with the latest in electronic and gas-cooled heating components and software. Its advantages include excellent thermal uniformity across its working chamber, along with precise control of timing parameters such as temperature, flow rates, and the speed of the resist spinning. At its core, SEMITOOL 880 S consists of two distinct components: a Photoresist Delivery System (PDS) and a Gas-Cooled Heating Reactor (GHR). The PDS utilizes a vacuum pump to draw the resist down on to a stainless-steel disc, where it is uniformly distributed across the disc at a controlled rate. This ensures the highest quality coverage and uniformity of the photoresist layer. The GHR is then used to heat the spinning resist, enabling the precise and accurate control of thermal parameters such as temperature and dwell time. 880-S offers a versatile range of processing applications and can be used for low temperature and low viscosity processing, such as photolithography and chemical etching, as well as high temperature and viscosity types of processing, such as PECVD, PVD, and HD process. The unit's efficient heat transfer capabilities and large temperature range of up to 1800°C allow for a variety of production-grade processing requirements. Furthermore, an intelligent process control machine (IPCS) allows for precise and reliable control of each phase of the production process. The IPCS helps to optimize throughput and enables custom profile creation for special recipes. Additionally, users have the ability to access such features as parameters, recipes and process data via a Windows-based GUI, as well as to create language-specific process instructions in the software. As a result of its advanced features and versatile design, 880S is a valuable solution for a variety of production operations and can be used to create precise and reliable photoresist components.
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