Used SEMITOOL 880S #38555 for sale
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ID: 38555
SRD with PSC101 or PSC102 digital controllers
Brushless Servo Motors
Heated Nitrogen
Door Hinge Left Side
Single Bolt Rotor setup
Bowls are 200 mm compliant
Functional condition
Video/Training/Startup/Acceptance: 4 hours at our site included
Options included:
Resistivity probe, attaches to PSC101 or PSC102
Anti Static with N2 purge
DI water Recirculation (note b)
Flaretek Fittings
Options available:
Particle verification with rebuild
Emergency power off
Mechanical door lock.
SEMITOOL 880S is a photoresist and thin film deposition system designed for semiconductor wafer processing and maskless lithography. It combines a highly efficient resist dispenser and mask aligner, a high-performance thin-film evaporation source, a quartz crystal microbalance (QCM) and integrated gas management into an easy to use, compact platform. SEMITOOL 880 S is the top of the line model in the 880 series, perfect for use in the semiconductor and opto-electronic industries. 880-S can dispense, align, and apply photoresists with accuracy and repeatability on both flat and complex surfaces. The highly efficient and robust dispensing technology enables reliable dispense patterns, even at high speeds and with extreme accuracy. 880 S is capable of handling hard to reach areas of substrates with ease. A two stage mask aligner ensures accurate alignment of the resist pattern to the substrate surface. Thin film deposition is enabled by a advanced evaporation source, controlled by global programmable parameters such as pressure, temperature, deposition rate and gas purity. The source has a low thermal mass, allowing for the efficient delivery of thin films that offer uniformity, uniform thickness and improved film properties. Additionally, an integrated quartz-crystal microbalance (QCM) provides real-time control of the deposition rate. SEMITOOL 880-S incorporates an advanced gas management system which enables pre-set gas and oxygen mixtures to be circulated quickly, thus optimizing the fabrication process. The device operates quietly, reducing contamination, and increasing process stability. 880S is also highly configurable and can be mounted onto existing processing tools for integrated processing. Overall, SEMITOOL 880S is an incredibly efficient, reliable and cost-effective photoresist and thin film deposition system. It is perfect for use in the semiconductor, opto-electronic and research industries.
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