Used SEMITOOL 880S #9163494 for sale
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ID: 9163494
Wafer Size: Up to 8"
Spin Rinse Dryer (SRD), up to 8"
Rotors
Up to 6" high profile
8" low profile (Fluoroware #A192-81M-0215)
7" square
102 controllers, digital
Non-contact Labyrinth rear bowl shaft seal
Brushless motor
(2) A192-81M rotors
Electro-polished bowl
Polypropylene cabinet - Aero style
Resistivity
Static eliminator
Documentation package
Particle counts < 25 at 0.3 micron
17 meg Ohm DI water and class 1 N2.
SEMITOOL 880S is a photoresist equipment designed to provide robust, reliable photolithography processing for a variety of applications. The system is capable of performing both single and double-sided processes for thin-film deposition on substrates and/or devices. The unit comprises of two distinct sections - pre-bake and exposure. The pre-bake section of the machine consists of an SEMITOOL 880 S Hot Plate Unit, which offers a range of temperature settings for the pre-baking of wafers before the application of photoresist. Additionally, the tool is designed with multiple fan settings, enabling users to adjust the convection force in the pre-bake chamber for uniform wafer temperature profiles. The pre-bake process is further supported by the vacuum-based cooling fans that help to reduce edge effects on the wafer. The exposure section consists of an 880-S Exposure Unit that is equipped with a 150W DUV (deep ultraviolet) lamp. This asset is used to expose photoresist layers on wafers. This process can be configured in both single and double-sided mode. For single-sided exposure, the model is capable of processing substrates up to 8 inches in diameter and up to 20mm thick. For double-sided processing, the equipment is able to process wafers up to 4 inches in diameter and up to 10 mm thick. The overall performance of the system is further enhanced by various safety systems that have been integrated into the design of the unit. These include auto-shutdown features for dielectric and metal masks, as well as a failsafe interlock unit. This ensures that 880 S photoresist machine operates within safe parameters and avoids equipment damage and potential harm to users. In conclusion, 880S is an advanced photolithography tool designed to provide precise, high-quality results for both single and double-sided processes. With an extensive range of features and safety systems, this asset is a reliable and efficient choice for any photolithography application.
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