Used SEMITOOL 880S #9774 for sale

SEMITOOL 880S Photoresist Equipment offers the highest level of precision and accuracy in the industry, designed for coating, exposing and removing photoresist in both patterned and planar conditions. It is a fully automated dual-column system capable of supporting up to eight cassette loads. SEMITOOL 880 S provides both chemical storage tanks and wafer resurfacing systems which increase process repeatability and unit reliability. 880-S Photoresist machine consists of a high temperature, high-pressure thermal coating station, a resist receptacle and an environmentally controlled workstation. The thermal coating station utilizes a unique gas-mixing technique to apply photoresist uniformly across a large area of either single layer or multi-layer materials. The resist receptacle enables accurate placement and retention of photoresist and supplies high-precision automated measuring for accurate dosage of photoresist onto wafers. The environmental chamber adds uniformity and stability to the process and is equipped with a powerful air conditioning tool for complete environmental control. 880 S also includes state-of-the-art imaging software which allows for rapid and accurate exposure of photoresist. The software enables alignment of the mask to the target and optimized control of the exposure process including selection of exposure conditions and parameters. The asset also features robust and reliable post-bake, strip and developer modules which provide accurate and consistent processing of photoresist. Together, these features of 880S provide superior accuracy and repeatability, while also reducing waste and cycle time. This model is ideal for photolithography applications in both R&D and high-volume production facilities. It can handle large scale resists over a broad temperature range with high chemical resistivity, ensuring excellent process results.