Used SEMITOOL / CALOGIC ST-870 #9265366 for sale

SEMITOOL / CALOGIC ST-870 is a top quality, computer-controlled photoresist equipment designed for the processing of silicon wafers in the semiconductor industry. It offers superior performance in terms of accuracy, repeatability and throughput. This system is designed to process large-scale integrated circuits (LSIs) and memory chips with up to 600um (micrometer) line sizing. CALOGIC ST-870 features a fully automated platform for wafer processing, featuring a range of motion, including several hundred millimeters of X-Y translation, and rotating around multiple axes. It also includes specialized robotic arms and grippers that enable smooth manipulation and loading of the photoresist on the wafer. The load and process cycles are completely automated and completely customizable, to meet the specific needs of the customer. Additionally, the unit can be set up with either a stationary or moving source. The machine includes an advanced photoresist dispensing unit that ensures precise and repeatable flow rates. This is assisted by an advanced controller, with a highly accurate linear stepper motor that ensures the uniformly dispersed film coating of the wafer in the production. The controller also allows for the application of softening chemicals, and a rinsing cycle for post-processing. SEMITOOL ST-870 is equipped with an advanced, precision-manufactured dual nozzle tool that allows for the simultaneous application of photoresist to both sides of a wafer. This asset also enables the application of pre-treatment chemicals for concentrations of moisture and humidity. Furthermore, this model features an advanced pulse modulation mechanism to control the temperature of the roller head and its associated circuitry, ensuring proper patterning of the photoresist coating. The equipment also features a computerized PRI system that allows the operator to program and control the entire process. This unit is completely programmable and can be used to invoke several options and functions, such as variable speed, overall wafer resistance, and variable nozzle size. Additionally, this machine is also capable of handling various types of glass and ceramic substrates for patterning. ST-870 is designed for high-performance applications, such as in-line fabrication, wafer fabrication, production test and measurement, and large-scale processing of small-sized chips. It is a fully automated tool that ensures repeatable accuracy and long-term performance.