Used SEMITOOL Cintillio #293653477 for sale

Manufacturer
SEMITOOL
Model
Cintillio
ID: 293653477
Wafer Size: 8"
Vintage: 2012
Spray Solvent Tool (SST), 8" Process: EKC / IPA Double chamber, 8" Bulkfill Clampshell rotor (3) Heated tanks (2) Unheated tanks (2) Tanks for EKC 265 (4) Tanks for IPA CDU Cabinet (280) Chambers / (50) Wafers (2) Fume sensors (5) LEVITRONIX Pumps BSM 4.2 / LC325 Fill vessel / metering pump SECS GEM Pump controller is missing Power supply: 400 V+N+PE, 35 A 2012 vintage.
SEMITOOL Cintillio is an advanced photoresist equipment designed for use in semiconductor tolling, packaging and assembly processes. Cintillio is a modular, automated system that includes a modulated top-down spin coater, bottom-up sprayer, and a laser-driven substrate handler/focusing unit. Its highly effective photoresist coating technology helps yield S-I-O interconnects, devices, and passivated structures with precision accuracy. SEMITOOL Cintillio spin coater starts with a patented basket platform which allows for quick process optimization by either spinning or rocking. It has a specially designed application chamber that evenly distributes the photoresist over the entire substrate surface. This is followed by top-down spin-coating which creates a uniform resist layer with high film integrity, process repeatability and full area coverage. Cintillio also incorporates a bottom-up sprayer for applying photoresist to the substrate's reverse side. This allows for resist thickness and uniformity on the back side of the substrate to be controlled and repeatable during the application process. The laser-driven substrate handler/focusing machine is designed to provide precise optical focusing for after the photoresist coating process. The tool focuses the substrate on the registration mark with repeatable accuracy, therefore allowing for repeatable overlay accuracy. The module has a built-in multi-laser asset that enables multiple devices to be processed in a single run. The model is capable of photoresist processing in a range of wafer sizes and configurations while providing traceable substrate tracking, process control and process review. SEMITOOL Cintillio equipment is flexible, efficient and allows for fast and easy process optimization. By using this system, users can accurately and reproducibly produce semiconductor devices, both in the laboratory and in production.
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