Used SEMITOOL ECP LT210 Cu #9095392 for sale

SEMITOOL ECP LT210 Cu
Manufacturer
SEMITOOL
Model
ECP LT210 Cu
ID: 9095392
Wafer Size: 8"
Cu Plating systems, 8".
SEMITOOL ECP LT210 CU is a photoresist equipment designed for large-scale production in the semiconductor industry. It is an integrated environment for the processing of a variety of photoresist materials. It provides a robust, automated platform for lithography processes and allows for precise film thickness and profile control. The system consists of a single hardware unit, a load-locked load port and process chamber, and associated control software. The process chamber contains a custom designed heating/cooling module for fast pre-bake and post-exposure bake cycles. The unit also includes a centrally located spray gun that precisely controls the exposure of the photoresist material. The spray gun aerosolizes the photoresist and dispenses the photoresist onto the surface of the wafer in a uniform, consistent deposit. In addition, ECP LT210 CU features a programmable spin motor and chuck for fast and efficient substrate loading and unloading, as well as a touchscreen control panel for easy operator control and diagnostics. The machine also has automated manual inputs that allow for quick recipe changes and predictive maintenance schedules. Overall, SEMITOOL ECP LT210 CU is a reliable and efficient photoresist tool that is ideal for large-scale production operations in the semiconductor industry. Its integrated environment provides for a highly automated platform that ensures consistent film thickness and profile control, as well as precise exposure control and quick recipe changes. The asset also allows for fast and efficient substrate loading and unloading, providing ease of operation and maintenance.
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