Used SEMITOOL EQ23 #9287636 for sale

SEMITOOL EQ23 equipment is a photoresist system designed for use in the manufacturing of semiconductor integrated circuits and other microelectronic devices. It is an automated track-based unit with a series of modules designed to provide a high-throughput solution for photoresist and other semiconductor fabrication processes. EQ23 machine is designed with a modular architecture and is composed of two separate tracks. The primary track consists of four process modules, including a wet module for photoresist processing, a spin rinse dryer module, a photoresist strip module, and a spin coat module for applying photoresist. The second track consists of three additional modules: a spin etch module for etching, a clean module for cleaning the chip after etching, and an inspection module for visual inspection. The tool enables users to have full control over all material transport and process functions, as well as on-board process parameter adjustments. The wet module includes a set of reservoirs for photoresist chemicals, an applicator for phtoresist pattenning, and a dielectric heated shower nozzle to ensure uniformity of the resist pattern. The spin rinse dryer module is used to spin the resist away from the substrate and the remaining resist is then automatically stripped away with the strip module. The spin coat module is designed to provide uniform deposition of photoresist over the substrate, while the spin etch module is used to etch away unwanted metal. The clean module is designed to thoroughly clean the substrate after metal etching, while the inspection module is used to visually inspect the quality of the processed dies. The asset offers efficient production with user friendly operation and reliable performance. The modular design allows users to modify or add modules to meet the demands of individual production processes, and the on-board process parameter adjustments provide a degree of flexibility to optimize the process. SEMITOOL EQ23 provides the necessary solutions for users seeking an automated photoresist model for precision production of semiconductor components.