Used SEMITOOL Equinox E0212 #70448 for sale
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ID: 70448
Wafer Size: 8"
Vintage: 1998
Copper plating system, 8"
Single cup copper plater
Chemical plating solution supply tank: ~5 gallons
Nitrogen
Vacuum
Chilled water
DI Water
CDA and Exhaust
Dedicated CO2 fire suppression system
Chemicals:
Copper sulfate
Sulfuric acid
Hydrochloric acid
Organic additives
Includes:
Power supply
Manuals
Exhaust: EF-LF 9A
Power: LF-UP 2
1998 vintage
SEMITOOL Equinox E0212 is a photoresist equipment that is used for the production of integrated circuits (ICs). It is a full-featured system that can support up to 1.2 µm of resist step and a feature size as small as 12 m. This unit is designed to process a variety of photoresist chemistries including positive photoresist, negative photoresist, solvent-resistant, and deep-UV photoresist. Equinox E0212 is equipped with a 5-axis coater/developer head, which enables precise, uniform resist coating and development. The machine includes a two-zone, jacketed, stainless steel tank for resist processing and a batch-level tool for the remaining three tanks. SEMITOOL Equinox E0212 is integrated with advanced robot technology, making it capable of handling large substrates up to 318 mm x 318 mm. The asset utilizes electro-mechanical wafer lifting and auto-leveling technology to ensure the uniformity of substrate loading and delivers production-level yield as small as 12 m line width. Aside from its features, Equinox E0212 is also designed to improve production throughput. It supports a variety of high-speed processes such as inline agitation, electro-mechanical chamber lid and speed control systems, as well as purge control model to minimize resist loss during step processing. This equipment also includes intelligent diagnostic capability for calibrations and machine status monitoring. To ensure user safety, SEMITOOL Equinox E0212 is equipped with safety and monitoring systems such as clean room monitoring, laser fracture, and a hazardous material management system. This unit also includes an emergency stop machine, which is activated in hazardous situations or tool malfunctions. Overall, Equinox E0212 is a full-featured photoresist asset that is designed to process a variety of photoresist chemistries with precision and efficiency. Its advanced features, such as the 5-axis coater/developer head and electro-mechanical wafer lifting, enable it to process substrates with feat production-level yields. It is also designed with safety in mind and includes several safety and monitoring systems.
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