Used SEMITOOL Equinox #9243044 for sale
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ID: 9243044
Wafer Size: 8"
Vintage: 2000
Etcher, 8"
Part number: E0212PMPLTNGETCH200
Process: Horizontal etch
(2) Chambers:
Chamber 1: Clean
Chamber 2: Horizontal chemical etch
SMIF System: Manual single wafer load
2000 vintage.
SEMITOOL Equinox is a photoresist equipment designed for the efficient handling and treatment of photoresist for the semiconductor industry. It is a fully integrated solution providing a reliable platform for recipe development and automation. The system features an end-to-end photoresist process, which incorporates pre-treatment, multiple baker modules, coating, exposure, developing, baking and post treatment. The unit includes an automatic line feature which allows it to integrate seamlessly into a factory automation control environment. It can be configured to accept wafer carriers from front-end processing equipment and output them to the next process step. The machine is designed to operate with a broad range of photoresists and successfully handles a wide variety of coating, exposure, developing, and baking processes. The tool is equipped with advanced control software to facilitate precise control over chambers, modules, process inputs, and output. Each module can be controlled independently via the proprietary control software. The software allows for the development and storage of process recipes for a variety of photoresist applications. The asset consists of easy-to-use touch-screen controls and a 10.4 inch TFT LCD display that allows for real time process monitoring and adjustment. Equinox is also equipped with an onboard camera for visual inspection and verification. It is also equipped with a temperature probe for accurate temperature monitoring and control. The model is equipped with extensive safety features, including the incorporation of a patented safety interlock equipment that prevents accidental operation of the system when doors are opened. Additionally, it features a circuit breaker safety unit that automatically shuts off power to the machine in the event of a fault or failure. All tool operation is monitored by a constantly running host computer. Overall, SEMITOOL Equinox is an advanced photoresist asset designed for efficient and reliable operation. It offers an integrated platform for developing photoresist recipes and automation, as well as advanced control software for precise process monitoring and adjustment. Additionally, it is equipped with multiple safety features to ensure safe operation.
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