Used SEMITOOL Equinox #9408167 for sale

SEMITOOL Equinox is a photoresist processing equipment designed for dry film applications in semiconductor wafer processing. It is specifically designed for use in high-volume production environments and offers a fully automated, hands-off approach to resist coating of the wafer surface. The system utilizes a proprietary pin-and-cup wafer transport unit, coupled with a UV light source and a precision gas delivery machine that delivers the resist material to the surface of the wafer. The pin-and-cup tool of Equinox allows for faster throughput and consistent coating quality between wafers, as well as easy retrieval of coated wafers. The asset also boasts an in-situ cleaning capability to ensure a clean processing environment. SEMITOOL Equinox is capable of delivering resist material at thicknesses ranging from 5 to 12 microns. The wafer transport speed is adjustable and capable of processing up to 150 wafers per hour. The UV light source for Equinox uses a series of lamps that emit UV light at a wavelength of 365 nanometers, which is ideal for the photolithography process. It also has a variable power supply for controlling the intensity of the light source. Additionally, SEMITOOL Equinox has a fully automated model for controlling the delivery of resist material, with up to four different pressure sensor points, as well as a number of gas and chemical delivery methodologies, such as bubbling and sputtering. Equinox utilizes a unique air filtering equipment to preserve consistent air quality within the machine. This system filters the air entering the machine through a set of filtration pads, ensuring a clean processing environment with minimal contamination. SEMITOOL Equinox is a powerful tool for photolithography and semiconductor wafer processing and provides an efficient, automated means of resist coating. It offers a wide range of capabilities, which makes it suitable for high-volume production environments, as well as research and development laboratories.