Used SEMITOOL / M-TECH ST-870 #9265364 for sale

SEMITOOL / M-TECH ST-870
Manufacturer
SEMITOOL / M-TECH
Model
ST-870
ID: 9265364
Wafer Size: 6"
Spin Rinse Dryers (SRD), 6".
SEMITOOL / M-TECH ST-870 photoresist equipment is one of the most advanced spin coaters on the market, with the capability of delivering cost-effective, quality results. M-TECH ST-870 is designed to ensure a precise, uniform film thickness when coating a wide range of substrates including Silicon, Quartz, Glass and Gallium Arsenide. It offers an advanced control package with a variety of automations built in. The system allows users to control motor adjustments, establish part weight profiles, and maintain critical substrates parameters. SEMITOOL ST-870 has a spin head frame design that is made up of three main components: the stainless steel spin frame work, the frame assembly, and the optional 'vacuum frame'. This design allows for a secure attachment of the substrate, ensuring accuracy and consistency when coating. The stainless steel construction, combined with a corrosion-resistant material finish, provide additional durability. The frame assembly holds the spin head in place during coating. It also features automatic angle adjustable arms that allow for a wide range of substrate angles to be sprayed without the need to change the spin direction. ST-870 features temperature-controlled heated thermal baths, as well as a forced air cooling process for improved performance. This unit can be used to coat single or multiple substrates at up to 2000 RPM, ensuring a uniform, homogeneous film every time. The motor torque is adjustable from start-up speeds to up to 33 G-cm. Motor adjustable Autopromissions enable users to set both initial cycle time and end time for continued cycle runs. Additionally, the rinse option allows for re-engineering of contaminated substrates with minimal effort. SEMITOOL / M-TECH ST-870 has a variety of application specific processes including Catalyst Coating, Molecularlayer Deposition (MLD), and Parylene CSD™ for superior photo-sensitive device protection. It also has a diagnostics machine with multiple adjustable parameters for optimizing performance and reducing cycle time. The tool includes a asset control board that can be connected to the central data management model, providing an easier and more efficient control of the process. M-TECH ST-870 is equipped with an integrated operations and process management monitoring and document control suite for improved equipment reliability. In summary, SEMITOOL ST-870 photoresist equipment is one of the most advanced spin coaters on the market today, offering a high-performance solution for coating a variety of substrates while maintaining uniform film thickness. It is designed for superior reliability, and features temperature-controlled baths and a forced air cooling process for increased performance. ST-870 is highly customizble, with numerous application specific processes and adjustable parameters to optimize performance. It is also equipped with an integrated operations and process management monitoring software for improved data management.
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