Used SEMITOOL Paragon LT-210 #9115016 for sale
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ID: 9115016
Electrochemical deposition platform, 4"
Model no: P210-F2-P2-T1-8-EE-5-2
(3) Copper ECDs
Nickel ECD
(2) Gold ECDs
Pre-Treat CPC
SRD
Pre-aligner
(3) CFD2 ECD Chambers for Cu plating
CFD2 ECD Chamber for Ni Plating
CFD2 ECD Chamber for Cyanide Au plating with ring contact (Split
chemical cabinet)
SAT Spray chamber for prewet-process
CFD2 ECD Chamber for Cyanide Au plating with J-Hook contact (Split
chemical cabinet)
Fire suppression system
4BAY-CDU
DYNATRONIX Power supply
Flowmeters
CE Certification / 400V Facilities
Cabinet material FRPP
Light tower
Manual
2002 vintage.
SEMITOOL Paragon LT-210 is a top-of-the-line photoresist processing equipment designed for high-volume wafer processing. The system is designed to provide superior uniformity and control of all wafer processes, from spin coating to resist removal. Paragon LT-210 unit includes a multi-zone gas delivery machine which provides separate gas control to all process zones, allowing for rapid and precise control of temperature, pressure and gas flow. An integrated UV LED lighting tool allows for uniform distribution of UV illumination across the process chamber for maximum uniformity and repeatability in processes such as photolithography. The asset also features an advanced, six-axis robotic arm with an integrated dental robot, providing precise execution of critical process steps. The dental robot is an innovative feature which allows for precise, precise alignment of lithography masks and resists. Additionally, the robotic arm ensures precise and repeatable execution of critical process steps. SEMITOOL Paragon LT-210 is built upon a highly reliable precision wafer transport model which combined allows for maximum uptime and reliability of the equipment. The system also features SEMITOOL patented ShuttleFlo turbo vacuum pumping unit, which provides rapid evacuation of vapors from the process chamber for rapid wafer turn-over. Additionally, Paragon LT-210 machine includes an integrated data logging and analysis tool which allows for secure and efficient logging of process parameters and detailed analysis of wafer process results. This allows for precise control of wafer surface resistivity and other critical process parameters, yielding superior wafer yields and improved process control. Overall, SEMITOOL Paragon LT-210 is a well-rounded photoresist processing asset designed for maximum control, reliability and process precision for high-volume wafer process applications. The model is built upon highly reliable hardware components with an integrated analysis package for detailed process analysis. The equipment is optimized for the highest yields and repeatability, making it an excellent choice for industry wafer processing needs.
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