Used SEMITOOL Raider ECD 210 #9355393 for sale
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ID: 9355393
Wafer Size: 8"
Vintage: 2004
Electroplating system, 8"
Model no: R310PD2 (1SA2CFD1CAP) 08 (CuNi) 03
(3) Cassette WIPs
Linear dual arm robot
With single vacuum end effector
Advanced Replenishment Unit (ARU)
(2) Chemical Delivery Units (CDU)
(2) Heat exchangers
DI Boost pump
Fire suppression system
With (3) CO2 Bottles
Computers:
WIP Computer
Module Computer
Robot Computer
Controllers:
Front User Interface (FUI)
Rear User Interface (RUI)
502 Controller
Operating system: Windows embedded
Chamber mainframes:
CPC 2 / Capsule, backside clean and bevel etch
CPC 4 / ECD, CFD3M
CPC 7 / ECD, CFD3M
CPC 9 / SRD
Missing parts:
Rings and lip seals
Anodes
Power supply: 208 VAC, 50/60 Hz, 4 Wires, 3 Phase
2004 vintage.
SEMITOOL Raider ECD 210 is a high-end photoresist equipment designed for applications ranging from semiconductor to MEMS fabrication. This system is designed to deposit and strip photoresist on wafers and substrates to create a surface layer and enable building of electronic components. It integrates accurate scanning to ensure uniform coverage of the layer over the entire area. Raider ECD 210 has an advanced and user friendly computerized software, specially designed for a quicker deposition and stripping process. This unit allows operator to program entire processes into the computer, such as coating speed and rates, as well as other parameters like pressure and temperature. SEMITOOL Raider ECD 210 provides better substance control by adjusting the required temperature, stirring speed and thermolenticular ratio. This machine offers adjustable spinning speeds and chemical solution containment, enabling optimal and uniform deposition of photoresist on the wafer or substrate. It offers generous flexibility and can handle a wide range of substrates of different materials, from silicon to quartz. The spinning chamber is easily controlled, allowing the chemical process to be rapidly set up. It can also effectively contain the chemical solution and reduce contamination of the photoresist layer. Raider ECD 210 is equipped with an RFID tool for tracking chemical location and storage, ensuring operator safety. It is also provided with an in-built interface to accurately control the speed and pressure of the coating process. Additionally, in order to ensure a smoother operation and the quality of the photosensitive layer, this asset is integrated with a vacuum stripping process. In order to provide consistent results, SEMITOOL Raider ECD 210 has in-built monitoring and control functions. This model is designed with advanced technology and provides consistently high yields, with a low-cost of ownership. Raider ECD 210 is suitable for a variety of applications, including integrated circuit fabriation and MEMS assembly.
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