Used SEMITOOL Raider ECD 310 #293652806 for sale
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ID: 293652806
Wafer Size: 12"
Vintage: 2009
Electroplating system, 12"
2009 vintage.
SEMITOOL Raider ECD 310 is an advanced photoresist equipment designed to provide optimal imaging process for extremely fine structures. It is based on SEMITOOL proven Automatic Reactive Ion Etching (ARIE) technology, providing superior image contrast, preferred imaging profile and high uniformity. SEMITOOL RAIDER ECD-310 is equipped with a next generation dry-etch ion beam source, which allows for high resolution imaging and fine etching of just a few nanometers. The system also utilizes reactive ion etching (RIE) for the efficient removal of photoresist and a special glow-discharge cleaning unit for superior defect control. In addition to providing optimal performance, Raider ECD 310 is also designed to reduce the cost of ownership. It is a single-operation machine, which eliminates the need for separate etch and clean steps. It also uses a universal Substrate Transfer Robot which enables efficient mask changing and fast processing speeds. RAIDER ECD-310 includes a robust Windows-based platform for efficient operation. Tool operation can be adjusted to individual preferences with a range of standard and optional features to choose from. This includes a process monitor to track asset performance and prevent imaging imperfections, to special plasma based features to ensure high lithographic resolution. SEMITOOL Raider ECD 310 is a reliable, high-performance solution for advanced imaging and etching of extremely fine device structures. It uses an advanced dry-etch ion beam model to ensure superior image resolution while minimizing cost of ownership by eliminating the need for multiple operations. Its robust Windows-based platform offers a range of features and controls which make it ideal for use in production and research settings.
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