Used SEMITOOL Raider ECD 310 #9384187 for sale
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SEMITOOL Raider ECD 310 is an automated resist stripping and cleaning equipment designed for precise photolithography etch processing. This system is used to strip and clean photoresist and other substrates required for etch processing in the semiconductor industry. SEMITOOL RAIDER ECD-310 is designed with an intuitive user interface, making it easy to use and simple to program. The unit uses an adjustable Megasonics mode, providing the user with a wide range of optimization options for etch process cleanliness. The machine features a dual tank tool, providing flexibility and efficiency in cleaning applications. Both tanks are built with enclosed cavities that are designed to restrict any liquid spillage. It also has a unique Multi-Step Option that can significantly improve process uniformity and integrity. The ECD 310 utilizes an efficient heating asset, providing a uniform heating profile during process operation. It is equipped with lift-off, spray-off and scrub-off cleaning applications. The lift-off mode uses heated DI water to achieve a uniform water surface in order to lift small particles of photoresist from the substrate. The spray-off mode uses high pressure to achieve gentle liquid removal from the wafer. The scrub-off mode utilizes ultrasonic cavitation energy for optimal cleaning. This model is highly automated, with advanced robotics for accurate transfer of substrates from one station to another. It is capable of handling a variety of substrates, such as photomasks, wafers, 200mm/300mm, and through-silicon vias (TSV). It also has robotic parts that can be programmed for cleaning process recipes and features a "batch mode" that allows for program recipes to be stored and recalled. The ECD 310 is compliant with SEMI S2 and EHS standards, making it safe for use in production. It has a modern color touch-screen that allows for easy operation and offers a range of features, including real-time process monitoring, process history, and reporting functions. Additionally, the equipment is portable and can be moved and set up anywhere. Overall, Raider ECD 310 is an advanced and user-friendly automated photoresist system that assists users with the etching process. It features a variety of functions and is compliant with industry standards, making it an ideal choice for etching applications.
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