Used SEMITOOL Raider ECD #9275234 for sale

SEMITOOL Raider ECD is a photoresist equipment designed to create low k and dry oxide film stacks for back end applications. This system is an electron cyclotron deposition (ECD) chamber which combines both UV exposure and decomposition techniques for optimal fabrication of low k materials. The unit utilizes two zonal compartments, separated by RF shield to allow deposition of oxide on the substrate and then decomposition of photoresist over the oxide structure. Raider ECD is an ideal machine for OEM applications and small wafer fabs as it is affordable, compact, and integrates a co-axial dual shutter tool for longer lifespans. SEMITOOL Raider ECD has a unique design and features that are advantageous for a variety of dielectric applications. It comes with a Preclean Asset that utilizes special organic and inorganic chemistries, to prepare substrate surfaces by removing any residual native oxide. It utilizes a dual shutter model to protect materials from particles and contaminants while allowing backward compatibility for legacy processes and acceptance of standard recipes. Raider ECD offers high flexibility with its distinct process chambers. The deposition chamber is designed to deposit oxide materials with precision, and the decomposition chamber is equipped with advanced photoresist techniques for fine line and feature printing. This photoresist process is capable of producing up to 6 different feature sizes and a minimum feature size of 40nm. Additionally, SEMITOOL Raider ECD is equipped with precision rate and bias control capabilities that enable precise layer thickness control of dielectrics. Raider ECD is a distinctive product that stands out in the photoresist market due to its high processing rate, low cost, and high level of precision. It has been proven to provide excellent performance in both academic and commercial applications. Its unique design and features make it a reliable equipment for any photoresist fabrication. SEMITOOL Raider ECD is an ideal photoresist system for those who seek economical, reliable, and precise photoresist processing.