Used SEMITOOL / RHETECH EQ242S/PR #293628380 for sale

RHETECH EQ242S/PR is a state-of-the-art photoresist processing equipment designed to enable consistent and reliable lithography results. It is equipped with an advanced E-beam lithography tool and a powerful UV laser making it a comprehensive solution for lithography applications. The design is optimized for rapid and repeatable processing of photoresists, ensuring superior process results. It is capable of processing a wide range of photoresists and enables rapid wafer alignment for reduced cycle times. The system consists of two key components; a vacuum process chamber containing a single cassette-size E-beam lithography tool and a UV laser ablation unit. The machine also features a planetary wafer alignment tool, enabling precise and repeatable wafer alignment. The design is optimized for the optimal performance of the E-beam lithography tool, reducing processing time and ensuring consistent process results. The asset includes an integrated process controller and data acquisition model. This allows for precise control of processes and process parameters, as well as providing detailed logging process results. The equipment also includes a wafer-handling system for the loading and unloading of wafers, as well as for ambient air wash and priming. The design is clean-room compatible, with sealed process chambers preventing contamination from outside sources. SEMITOOL EQ242S/PR is an ideal photoresist processing unit for many industrial and research applications. Its advanced process control and data acquisition systems ensure precise and repeatable process results, and its modular design enables easy integration into existing process flows. Its capabilities allow it to accommodate a wide range of photoresists, making it a versatile and reliable solution for a wide variety of photoresist processing needs.