Used SEMITOOL / RHETECH P28SR11S-10001 #9357791 for sale

SEMITOOL / RHETECH P28SR11S-10001 Photoresist Equipment is a high-performance, automated system designed to process wafers with photoresist layers. With advanced features and a robust Servo-Robot controlled cleaning module, it is capable of handling the most challenging photoresist tissues, for example, compounds and thin films. The unit is composed of 4 main components - a process chamber, a liquid handling module, a PLC control unit, and an exhaust unit. The process chamber has a unique design which allows the machine to manage and control the wafer temperature precisely and with precision. It also has a low pressure pulsed plasma source inside the chamber which is used to enhance the performance of the photoresist. The plasma created inside the chamber is highly consistent and is ideal for both etching and thickening of the photoresist layer. The chamber is also equipped with two safety systems - an oxygen sensing module and a titanium oxide millimeter filter - which can detect any presence of oxygen and shut down the process in case of an emergency. The liquid handling module is used to measure, dispense and extract chemicals for the photoresist processes. This module has precision metering and linear stages to work with containers of specific sizes. The precision metering uses robot-assisted precision to extract and dispense liquids. The PLC (Programmable Logic Controller) is used for controlling the entire process. This provides accurate and reliable control of all the stages in the photoresist process. The exhaust unit is designed to capture, contain and exhaust gaseous products produced during the photoresist process. It has a wide variety of safety features to ensure the safety of the workforce and reduce the impact of hazardous fumes. These features include a built-in safety valve, a flame arrestor, and a secondary gas shield to capture and manage hazardous gas release. It also includes an optional ionizing filter to reduce the risk of static electricity build up. With its advanced features and capabilities, RHETECH P28SR11S-10001 Photoresist Tool is the ideal tool for producing high-performance photoresists with precision and consistency. The asset ensures precise results, with consistent product quality, making it an ideal tool for a range of industries, including semiconductor, optoelectronics and many more.