Used SEMITOOL / RHETECH ST-870 #9265367 for sale

SEMITOOL / RHETECH ST-870
ID: 9265367
Wafer Size: 6"
Spin Rinse Dryers (SRD), 6".
SEMITOOL / RHETECH ST-870 is a photoresist equipment that is designed to enable users to achieve critical process steps, such as coating, developing, and imaging of photoresist substrates. The system is equipped with a precision robotic arm which reaches the substrate and passes it through multiple sequential steps in the photoresist process. The unit utilizes process mode and exposure control software for precise bath temperature control, photo process time and preset detection of film thicknesses. In addition, the machine is equipped with a top camera for substrate recognition, a high resolution monitor, and a high precision image analysis tool. RHETECH ST-870 supports a range of photoresist types including positive and negative chrome, ZEP520A, AZ5214E, and S1813. It also has features for pre-alignment of the substrate, controlling the number of exposure stages, and controlling the cycle time of the wet bath. The asset is equipped with a full range of images and automatic image adjustments, allowing users to produce high resolution photoresists with exacting accuracy. SEMITOOL ST-870 is equipped with an electronically controlled dispensing model for precision deposit of photoresist into either rigid or flexible substrates. This dispensing equipment allows for precise layering of photoresist on substrates, allowing users to create intricate patterns with great accuracy. ST-870 offers an integrated development system that is capable of delivering consistent photoresist results. This development unit utilizes a vertical spin-coat approach with adjustable speed settings for optimal results during the development cycle. The machine allows for up to six rinsing steps for complete removal of photoresist from the substrate. SEMITOOL / RHETECH ST-870 also features a cleaning station that includes deionized water purging, cleaning with solvent, desiccant, and dry nitrogen to optimize post-development process. The cleaning station is designed to ensure a consistent and uniform ashing process. Overall, RHETECH ST-870 tool is a highly versatile photoresist platform with sophisticated automation capabilities that enable users to achieve accurate and precise results in the manufacturing of photoresist substrates. This asset is suitable for a wide range of users, from large volume production to smaller scale operations.
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