Used SEMITOOL / RHETECH ST-870 #9288369 for sale

SEMITOOL / RHETECH ST-870 photoresist equipment is an equipment developed for the deposition of photoresist on wafers in order to produce integrated circuits. Photoresists are photosensitive materials that are used in microelectronics fabrication for transferring patterns from a photomask to the surface of a wafer or substrate. RHETECH ST-870 is a powerful and reliable system designed to provide precise photolithography processes for ultra fine patterning and short features requirements. SEMITOOL ST-870 consists of various components, beginning with the Substrate Alignment Robot (SAR) module that provides high accuracy substrate alignment for accurate overlay and focus. Its automated loader contains a special cooled chamber for keeping the photoresist and reducing particle generation. It is also equipped with an onboard vision unit to check for defects on wafers before they are loaded. The machine also includes a Gas Delivery Modules (GDM) which provides the necessary heated or cooled gases to control temperature and pressure in the deposition chamber. The next component is the deposition module, which consists of a vacuum deposition source and dual bake technology providing uniform and rapid heating and cooling of wafers. The tool is further equipped with a spray head that is capable of achieving a variety of spray angles and operating pressures, allowing for more control over the photo resist spray pattern. It also utilizes a low-flow dielectric bubbler which ensures uniform coverage for devices with high aspect ratios. Finally, the photoresist is applied using a high-powered pulsed UV TLD light source. It offers a high degree of flexibility to enable users to meet challenging dimensions and tight geometries. The light source is also equipped with an angle lock to ensure precise patterning and alignment with the photomask. The asset can be used with various types of wafers like standard 8-12 inch, 300mm and 450mm. Overall, ST-870 is a powerful and reliable photoresist model that offers high levels of accuracy and precision to produce intricate microelectronic devices. Its automated loader and dielectric bubbler ensure smooth and even coating of photoresist. Its high-powered light source allows for precise patterning and alignment and its temperatures and gas delivery modules allow for uniform heating and cooling of wafers. SEMITOOL / RHETECH ST-870 is a great choice for targeted and precise microelectronic circuit fabrication.