Used SEMITOOL / RHETECH WST-306AC #9265377 for sale

SEMITOOL / RHETECH WST-306AC
ID: 9265377
Wafer Size: 6"
Vintage: 1997
Spray solvent system, 6" 1997 vintage.
SEMITOOL / RHETECH WST-306AC is a photoresist equipment for wafer substrate processing. This system is ideal for semiconductor processing such as ICs and MEMS applications, It incorporates a number of "smart" features for improved throughput and accuracy. For wafer processing, RHETECH WST-306AC uses a proprietary "microprocessed" pool heater, providing more uniform and precise temperature control. This unit also features a SubRack™ design, which allows for up to three small-footprint modules to be inserted. This modular design allows the user to customize the machine according to their specific needs. In addition to the pool heater, the tool can be equipped with chemical delivery, waste disposal, and oven modules, allowing for distinct point-of-use or batch operations. SEMITOOL WST-306AC Photoresist Asset is built and designed using "smart" technology, allowing for improved processing accuracy and throughput. For example, the process controller is equipped with a "Wafer Flow" feature, which enables the model to track substrate progression throughout the process. This feature allows for the automated checking of wafer parameters at predetermined points throughout the duration of the process. Other smart features include process recipe control, faster cycle time, and recipe tracking. Using pulse reverse, the equipment can accurately control photoresist premix, rinse, bake temperature and bake time parameters. This pulse reverse technology is capable of controlling with microsecond accuracy and is highly repeatable. WST-306AC also features a photoresist ashing process that can reduce debris buildup. The system is equipped with redundant safety features, which include overtemperature protection, override protection, and thermal shutdowns. These features protect from improper operation and/or operator error. Overall, SEMITOOL / RHETECH WST-306AC Photoresist Unit is an ideal tool for semiconductor wafer processing. Its features, such as the "smart" technology, pulse reverse, and SubRack™ design allow for efficient and controlled processing, with minimized waste and downtime.
There are no reviews yet