Used SEMITOOL / RHETECH WST-306AC #9265378 for sale

SEMITOOL / RHETECH WST-306AC
ID: 9265378
Wafer Size: 6"
Vintage: 1997
Spray solvent system, 6" 1997 vintage.
SEMITOOL / RHETECH WST-306AC photoresist equipment is a high-performance photoresist processing system designed to meet the strict requirements of the semiconductor industry. It is a highly reliable, robust unit capable of handling substrates up to 300mm in diameter with a process repeatability of ±2μm. Additionally, the machine features an ultra-low-cost of ownership and provides maximum throughput with minimal operator maintenance. RHETECH WST-306AC photoresist tool includes a robotic substrate loader providing high accuracy, automated substrate loading, unloading, and substrate presentation. SEMITOOL WST-306AC is equipped with dual-chamber option, providing two separate chambers for processing a substrate in order to minimize downtime and maximize productivity. The resist sprayer on WST-306AC asset is a high-precision, low-particle-count sprayer which maintains a constant pressure and/or flow within a dynamic range. The model also features a meniscus control loop which helps to accurately control the spray pattern and resist thickness. The equipment has the capability to accurately apply resists at an extraordinarily high speed, without the need for manual intervention during resist filling. SEMITOOL / RHETECH WST-306AC system is integrated with advanced imaging optics to provide improved process visibility. The imaging optics transmit ultra-high resolution images that can be used to provide detailed information on resist fill patterns. Additionally, the unit incorporates an advanced message display board to display the process result. RHETECH WST-306AC photoresist machine provides excellent optical performance with its coated glass optics and is precisely aligned with laser interferometry for maximum efficiency and accurate image processing. The tool is also equipped with an advanced control asset, allowing for precise control of resist deposition, temperature, and pressure. Furthermore, it is highly automated, with automatic substrate identification, automatic load/unload, and advanced self-diagnostics. In conclusion, SEMITOOL WST-306AC serve as an ideal platform for photoresist processing in semiconductor production. The model features extreme accuracy, precise process control, and cutting-edge automation, to effectively meet the needs of the modern semiconductor industry.
There are no reviews yet