Used SEMITOOL SAT 111 (25 08) 0U #293628381 for sale
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SEMITOOL SAT 111 (25 08) 0U is a fully automated photoresist equipment designed for wafer cleaning and coating. This system is suitable for both high-volume and prototype production. It offers tight integration of substrate handling, etching, and post-coating processes for a comprehensive solution for resist coating processes. The SAT 111 utilizes advanced computer control systems forwafer sensing and handling, edge control, recipe management, and main control. Its main features include an autofocus unit for consistent image quality, a single thermalized roll-to-roll process capable of handling substrates up to 200mm in diameter, and advanced bake control and temperature monitoring systems. The resist chemistry is designed to provide uniform resist coverage over a wide wafer size range. The automated wafer-handling machine provides reliable substrate transportation. The tool's edge control ensures a uniform edge exposure for improved edge-dosing accuracy. Its advanced recipe management asset allows users to quickly select a recipe for any wafer size range. The bake control model is designed to provide accurate thermal profiles for improved performance and quality. The SAT 111 also features a dedicated edge-extraction equipment. This system eliminates manual handling and provides accurate edge-inspection performance. The unit also features a ramp-up protection machine, which prevents damage to unprotected substrates. In addition to its automated features, the SAT 111 offers a range of safety features. It has been built to comply with strict safety standards, including shock protection and overcurrent monitors. The tool also offers enhanced monitoring options, including temperature logging and frequency monitoring. It also offers an intuitive user interface that guides users through the entire process. SEMITOOL SAT 111 (25 08) 0U is a powerful and reliable photoresist asset designed to meet the demanding needs of wafer cleaning and coating. With its automated wafer handling, advanced recipe management and bake controls, as well as its high safety standards, the SAT 111 provides a comprehensive solution for photoresist coating processes, making it ideal for both high-volume and prototype production.
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