Used SEMITOOL SAT 2060D #151789 for sale

Manufacturer
SEMITOOL
Model
SAT 2060D
ID: 151789
Etcher.
SEMITOOL SAT 2060D photoresist equipment is a compact, cost-effective photoresist processing solution that is ideal for commercial, laboratory, and research applications. The system is capable of providing precise wet cleaning steps and advanced post-resist bake steps. The unit is easy to use, operate, and maintain, with a fully automated recipe-driven approach to provide consistent and reliable results. SAT 2060D features a dual track design which allows for higher throughput production. The dual track design also allows for greater access to the wafer carrier area, aiding ergonomics and operator safety. The machine uses an APC (Advanced Process Control) to precisely control the heating and cooling ramp rates ensuring precise timing and temperatures which helps to ensure consistent and repeatable results on each given run. The tool also has built-in self-diagnostics and recipe programming which ensures consistent and reliable performance. The asset employs two independent wafer carriers for two separate processes, which is ideal for multi-step resist strip operations. The model offers a choice of four different sets of standard equipment configurations with 3, 5 or 8-Modules per cycle, or the standard 8-Module configuration with additional option modules. SEMITOOL SAT 2060D uses advanced SCADA (Supervisory Control and Data Acquisition) technology for greater data gathering accuracy, process control and alarm monitoring. The system features a choice of re-usable or disposable wafer carriers and provides precise wet cleaning processes, end point readings, wafer position adjustment and post-resist bake process steps. It is capable of running up to 1,500 wafers per hour, depending on the configuration. There is also the option to choose from a variety of chemicals, including dilute hydrofluoric acid (HF) and sulphuric acid (H2SO4) solutions. SAT 2060D offers a wide range of features and flexibility which makes it perfect for a variety of photoresist processing applications. The short cycle times, precise end point readings and wafer position adjustments make it an ideal choice for commercial, laboratory and research applications. The unit can provide consistent and reliable results on each run, making it an incredibly reliable photoresist machine which offers precision, reliability and cost-effectiveness.
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