Used SEMITOOL SAT 2080S #9210337 for sale

SEMITOOL SAT 2080S
Manufacturer
SEMITOOL
Model
SAT 2080S
ID: 9210337
Wafer Size: 8"
Spray acid system, 8".
SEMITOOL SAT 2080S Photoresist Equipment is a high-performance, high-capacity lithography system widely used in the semiconductor industry. The unit provides maximum yields and enables repeatable process flows by meeting the most challenging specifications and requirements. This machine uses state-of-the-art two-wavelength scanning and step-and-repeat exposure capabilities to address the need for the highest resolution levels demanded by advanced and future transistor technologies. The tool is based on two-wavelength SpectraBroadband™ with a near-infrared (NIR) wavelength of 775nm, allowing smaller structures and higher resolution. The asset also features a unique auto-exposure tunnel (AET) concept, which automates the exposure cycle and delivers greater throughput, higher yields, and improved quality control. The model is also equipped with integrated process monitoring features such as full metrology feedback, wafer process diagnostics and control, and recipe defect characterization. This enables improved process understanding, wafer-level fault detection, and prediction of pattern-related defects. The equipment also provides multi-process and multi-product flexibility, with an optional dual-chamber etch module along with external chambers for pre- and post-etch processing. Furthermore, it is available with NexBar® barcode reader, which automates the cassette management process and ensures accuracy. SAT 2080S Photoresist System is a top-of-the-line tool ideally suited for both research and production. It leverages advanced optics, automation, process-monitoring tools, and yield improvement strategies to deliver higher yields and repeatable process flows. Its ability to meet the most demanding specifications ensures that this unit will remain an industry-leading solution for many years to come.
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