Used SEMITOOL Scepter #293831473 for sale
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SEMITOOL Scepter is a photoresist equipment designed for applications in the semiconductor industry. This system is used for the deposition of thin films of photoresist, a material that resists ultraviolet (UV) radiation. This is an advance unit, engineered for high throughput wet x-ray or electron beam direct-write applications. Scepter is designed with the highest quality materials, with a focus on thermal stability, uniformity, and particle control. It includes three tanks that are heated together, each with its own independent temperature control, so that the reactor temperature can be closely monitored and controlled. SEMITOOL Scepter also features a vacuum machine that can reduce outgassing and promote uniformity. Scepter's advantage comes from its unique features such as its fast pump cycle times, an adjustable track gauge, a recirculation lift kit to promote uniformity along wafer edges, lid tool for improved edge integrity, and its eight-level digital power control. SEMITOOL Scepter improves the quality of the layer deposited, allowing deposition rates up to 15 microns/sec and uniformity of +/- 4 microns across a 6 inch wafer. In addition, it works with traditional photomasks and has a resolution capability of up to 0.6 microns, and produces photo-resist layers from 0.5-2.0 microns thick. The asset is also manufactured with stainless steel components, making it ideal for working with a variety of photoresist materials. Scepter is used by many leading fabs worldwide and has set a new standard for photoresist performance. It offers superior consistency in uniformity and deposition rates, as well as the ability to work with a variety of masks. The model also provides a fast cycle time and easy access for maintenance, making it an ideal choice for many different types of photoresist deposition processes.
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