Used SEMITOOL Semitool 860 #9124362 for sale
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ID: 9124362
Wafer Size: 5"
Spin rinse dryer, 5"
Double stack bowl
PC101 Controller
Conductivity/resistivity monitor
120V, 15 amps, 50 / 60Hz.
SEMITOOL Semitool 860 is a dedicated photoresist equipment designed to enable users to create advanced photoresists patterns with ease. It comprises of several components, which are incorporated together to provide a platform to makes and optimize electronic devices for manufacture. The main component of Semitool 860 is the proprietary Opto-electronic Scanner (OE-1). This scanner is programmed and optimized to scan the user-defined photoresist pattern with high accuracy and consistency. It employs advanced optics, including two laser beams: one is used for creating the UV pattern required for the photoresist material, while the other is used to create the control of each individual laser pulse in order to create the desired pattern. The laser pulse can be fine-tuned for different photoresist types. The exposure table of SEMITOOL Semitool 860 is designed to ensure high uniformity and minimal distortion during the exposure process. Its air-bearing system makes sure that the photoresist pattern is accurately exposed to the UV source, resulting in a well-defined exposure. Furthermore, the table enables a user-controlled, sag-free and low stress alignment process, while the digitally-controlled gantry provides precise pattern size control. Semitool 860 is also equipped with a series of advanced software tools that can be used to optimize the photoresist pattern and process. This includes a CAD library, allowing users to import standard shapes, and a pattern recognition algorithm, which can recognize the shape of photoresist patterns. The software also allows for interactive control over the exposure process, allowing a user to adjust the optical unit settings, and the software offers a wide range of metrics such as geometric area, peak intensity, and surface roughness. In addition, the machine includes a base station, which provides several programmable safety and automation settings to maintain the highest quality production. This includes real time monitoring of UV exposure levels, substrate temperature control, and automated wafer handling. The station can also be used to monitor and adjust the laser output during the process to ensure optimal photoresist pattern production. SEMITOOL Semitool 860 is a powerful, user-friendly tool that provides an efficient, advanced photoresist pattern creation process. Its state of the art components and software ensure high accuracy and reliability, and with its array of features and functions, users can create the most intricate photoresist patterns with ease.
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