Used SEMITOOL Sirius #293622591 for sale
URL successfully copied!
Tap to zoom
ID: 293622591
Wafer Size: 12"
Vintage: 2008
System, 12"
Rotor, 8"
Stainless steel 316
Process: Spray ozone
Ammonia process modules
ASTEX AX8400 Ozone generator system
BMT 930 Ozone monitor
Ammonia tank
Mix control
Standard pneumatic panel
DI Panel
O2 Panel
NH4OH Panel
Motor
Control
TREBOR Quantum 30 Hot DI system
Voltage: 380 VAC, 45 Amp
Power supply: 50/60 Hz, 208 VAC
Full load current: 45 AMP
Largest motor or load :20 Amp
2008 vintage.
SEMITOOL Sirius is a fully automated photoresist equipment manufactured by SEMITOOL. It is developed for advanced photolithography applications in the semiconductor industry. The system offers high-performance features such as laser-activated scanning and contactless resist strip, automated wafer handling and processing, and a simple user interface. Sirius unit is designed to achieve the highest level of wafer surface pre-processing. It enables the accurate deposition of photoresist onto a substrate surface and maintains the surface uniformity suitable for micro-lithography processing. The machine is composed of a single chamber, processor head, and a DC-power source. The processing head is equipped with a dyejet, which delivers photoresist to the wafer surface prior to deposition. The dyejet tool is mounted on a manipulator, and is programmed to pattern the surface of the wafer according to a programmed set of instructions. SEMITOOL Sirius features an integrated auto-straightening technology to ensure the accuracy and reliable performance of the micro-lithography process. It utilizes a laser-guided scanning asset that accurately adjusts the angle and alignment of the scanner head in relation to the wafer surface. Sirius also offers a contactless resist strip feature, which provides much better control of the strip process and eliminates the need for manual handling. SEMITOOL Sirius model has a user-friendly graphical user interface (GUI) and is fully compatible with standard software packages. It is modular in design and can be upgraded with additional features and parts when needed. The equipment features self-test functions and a diagnostic system to ensure reliable photoresist deposition. Sirius unit is ideal for advanced photolithography applications, delivering high resolution and process accuracy and repeatability. The machine is reliable, efficient, and cost-effective, making it a great choice for semiconductor industry applications.
There are no reviews yet