Used SEMITOOL Sirius #293671304 for sale
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SEMITOOL Sirius is a photoresist equipment designed for critical photolithography processes used in the production of cutting-edge microelectronic components. The system features a process suite including an Auto Expose (AE), Auto Develop (AD) station and a Photoresist Strip (PS) station, all integral components in producing sophisticated microelectronic components. The AE station plays a key role in the photolithography process, where a coating of photoresist (resin) is applied to a silicon wafer or other material substrate and then exposed to visible light. The AE station is designed to accurately expose the photoresist with intense, even lighting levels with minimal distortion and wafer lean. The AD station then automatically develops the exposed photoresist, removing the irradiated components and etching the circuit pattern onto the substrate. Unlike manual processing, the AD station is designed to provide very precise results with increased safety and efficiency. Finally, the PS station strips away the remaining photoresist from the substrate, leaving the etched circuit pattern. This step provides smooth finish and frees the substrate for further processing. Sirius is designed to increase production efficiency with quick cycle times, while optimizing cost savings. It also simplifies unit operation by providing intuitive controls and an automated operating machine. For further customization, users can integrate third-party software into the tool for a tailored photolithography solution. To ensure uniformity and quality of results during the photolithography process, SEMITOOL Sirius is equipped with a number of advanced features. This includes a autofocus feature for detecting and compensating for substrate surface irregularities, an auto-calibration tool for optimizing imaging results, and a number of other frequently-used functions to streamline the processing of photoresists. For added safety, the asset also includes an emergency stop function that can be used to quickly halt the model and reduce potential hazards from operator error. Sirius is an ideal choice for manufacturers who require the latest and most accurate photolithography tools for their production processes. With its robust design and automation capabilities, accurate and uniform processing is achievable with minimal downtime.
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